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Retargeting RSFQ cells to a submicron fabrication process

Authors :
Brock, Darren K.
Kadin, Alan M.
Kirichenko, Alex F.
Mukhanov, Oleg A.
Sarwana, Saad
Vivalda, John A.
Wei Chen
Lukens, James E.
Source :
IEEE Transactions on Applied Superconductivity. March, 2001, Vol. 11 Issue 1, p369, 4 p.
Publication Year :
2001

Abstract

Research is presented concerning the investigation of the processes involved in decreasing the gate sizes in the niobium Josephson IC fabrication process in order to increase packing density and speed.

Details

ISSN :
10518223
Volume :
11
Issue :
1
Database :
Gale General OneFile
Journal :
IEEE Transactions on Applied Superconductivity
Publication Type :
Academic Journal
Accession number :
edsgcl.78630898