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Retargeting RSFQ cells to a submicron fabrication process
- Source :
- IEEE Transactions on Applied Superconductivity. March, 2001, Vol. 11 Issue 1, p369, 4 p.
- Publication Year :
- 2001
-
Abstract
- Research is presented concerning the investigation of the processes involved in decreasing the gate sizes in the niobium Josephson IC fabrication process in order to increase packing density and speed.
Details
- ISSN :
- 10518223
- Volume :
- 11
- Issue :
- 1
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Applied Superconductivity
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.78630898