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Global model of inductively coupled Ar plasmas using two-temperature approximation
- Source :
- Journal of Applied Physics. April 15, 2001, Vol. 89 Issue 8, p4240, 7 p.
- Publication Year :
- 2001
-
Abstract
- A Langmuir probe was used to measure electron energy distribution function in an inductively coupled rf Ar discharge.
- Subjects :
- Laser plasmas -- Research
Thin films, Multilayered -- Research
Physics
Subjects
Details
- ISSN :
- 00218979
- Volume :
- 89
- Issue :
- 8
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.76323915