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Integrated amorphous and polycrystalline silicon thin-film transistors in a single silicon layer
- Source :
- IEEE Transactions on Electron Devices. April, 2001, Vol. 48 Issue 4, p707, 8 p.
- Publication Year :
- 2001
-
Abstract
- It has been possible to integrate amorphous and polycrystalline silicon thin-film transistors with good performance in a single film of silicon without laser processing.
Details
- ISSN :
- 00189383
- Volume :
- 48
- Issue :
- 4
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.75200409