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Silicon-on-Nothing (SON)-an innovative process for advanced CMOS
- Source :
- IEEE Transactions on Electron Devices. Nov, 2000, Vol. 47 Issue 11, p2179, 9 p.
- Publication Year :
- 2000
-
Abstract
- A novel CMOS silicon on nothing device is reported.
Details
- ISSN :
- 00189383
- Volume :
- 47
- Issue :
- 11
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.69531848