Back to Search
Start Over
Series operation of direct current xenon chloride excimer sources
- Source :
- Journal of Applied Physics. Sept 15, 2000, Vol. 88 Issue 6, p3220, 5 p.
- Publication Year :
- 2000
-
Abstract
- Series operation of direct current xenon chloride excimer sources is investigated.
- Subjects :
- Xenon -- Research
Physics
Subjects
Details
- ISSN :
- 00218979
- Volume :
- 88
- Issue :
- 6
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.67833877