Fracture strength and fatigue of polysilicon determined by a novel thermal actuator

MLA

Kapels, Hergen, et al. “Fracture Strength and Fatigue of Polysilicon Determined by a Novel Thermal Actuator.” IEEE Transactions on Electron Devices, vol. 47, no. 7, July 2000, p. 1522. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.64753553&authtype=sso&custid=ns315887.

APA

Kapels, H., Aigner, R., & Binder, J. (2000). Fracture strength and fatigue of polysilicon determined by a novel thermal actuator. IEEE Transactions on Electron Devices, 47(7), 1522.

Chicago

Kapels, Hergen, Robert Aigner, and Josef Binder. 2000. “Fracture Strength and Fatigue of Polysilicon Determined by a Novel Thermal Actuator.” IEEE Transactions on Electron Devices 47 (7): 1522. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.64753553&authtype=sso&custid=ns315887.