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Longitudinal spatial coherence applied for surface profilometry
- Source :
- Applied Optics. August 10, 2000, Vol. 39 Issue 23, 4107
- Publication Year :
- 2000
-
Abstract
- A method of optical coherence profilometry, believed to be new, is demonstrated. This method is based on the spatial, rather than the temporal, coherence phenomenon. Therefore the proposed interferometric system is illuminated by a quasi-monochromatic spatial incoherent source instead of a broadband light source. The surface profile is measured by means of shifting the spatial degree of coherence gradually along its longitudinal axis while keeping the optical path difference between the measured surface and a reference plane constant. Experimental proof of the new principle is presented. [C] 2000 Optical Society of America OCIS codes: 110.4500, 120.3180, 050.1950, 100.6950, 030.1640, 120.6660.
- Subjects :
- Coherence (Optics) -- Research
Astronomy
Physics
Subjects
Details
- ISSN :
- 1559128X
- Volume :
- 39
- Issue :
- 23
- Database :
- Gale General OneFile
- Journal :
- Applied Optics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.64698560