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Correlation analysis of particle clusters on integrated circuit wafers

Authors :
Stapper, Charles H.
Source :
IBM Journal of Research and Development. Nov, 1987, Vol. v31 Issue n6, p641, 10 p.
Publication Year :
1987

Subjects

Subjects :
Integrated Circuit Fabrication
Failure Analysis
Fault Tolerance
New Technique
Integrated Circuits
Technology
Semiconductor Preparation
Correlation Analysis
Product Failures

Details

ISSN :
00188646
Volume :
v31
Issue :
n6
Database :
Gale General OneFile
Journal :
IBM Journal of Research and Development
Publication Type :
Periodical
Accession number :
edsgcl.6300829

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Authors Abstract Subjects Details