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X-ray absorption of Si-C-N thin films: A comparison between crystalline and amorphous phases
- Source :
- Journal of Applied Physics. Nov 15, 1999, Vol. 86 Issue 10, p5609, 5 p.
- Publication Year :
- 1999
-
Abstract
- High-energy spherical grating monochromator and InsB(111) double crystal monochromator beamlines were used to measure the C, N and Si K-edge x-ray absorption spectra of c- and a-Si-C-N films.
- Subjects :
- Silicon carbide -- Research
Thin films -- Research
Physics
Subjects
Details
- ISSN :
- 00218979
- Volume :
- 86
- Issue :
- 10
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.62897258