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Pull-in study of an electrostatic torsion microactuator
- Source :
- Journal of Microelectromechanical Systems. Dec, 1998, Vol. 7 Issue 4, p373, 7 p.
- Publication Year :
- 1998
-
Abstract
- Pull-in study of an electrostatic microactuator is essential for making the electrostatic actuation more effective. In this paper, pull-in analysis is presented for an electrostatic torsion microactuator. The torsion microactuator can be used as a microtorsion mirror. A polynomial algebraic equation for the pull-in voltage and pull-in angle of a torsion microactuator is derived. Two types of microactuators fabricated using bulk micromachining are presented. Measurements done on the fabricated microactuators are reported, showing deviations within 1% error from the calculations. [325] Index Terms - Electrostatic, microactuator, micromirror, pull-in, torsion.
Details
- ISSN :
- 10577157
- Volume :
- 7
- Issue :
- 4
- Database :
- Gale General OneFile
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.57877943