Preparation of YBCO thin film by MOCVD method using new liquid metal organic precursors

Low melting point yttrium, barium and copper complexes such as tris(2,2,6,6-tetramethyl-3,5-octandionato)yttrium (Y(TMOD)3), Ba(TMOD)2 and bis(6-ethyl-2,2-dimethyl-3,5-octanedionato)copper (Cu(EDMOD)2) have been used by the metalorganic vapor deposition method as liquid precursors in fabricating yttrium barium copper oxide (YBCO) thin films. The grown thin films were observed to have a uniformed thickness of 200 nm and exhibit normal c-axis orientation.