Processing dependence of biaxial texture in yttria-stabilized zirconia by ion-beam-assisted deposition

Biaxially textured yttria-stabilized zirconia thin films served as a buffer layer for subsequent deposition of oriented YBa2Cu3Ox films. The thin films were deposited on randomly oriented Hastelloy C and stainless steel 304 at room temperature. The 0.16-1.3 microns thick YSZ films were deposited at rates of 1.2-3.2 angstroms/sec through e-beam evaporation. An Ar/O2 ion beam directed at the substrate during film growth produced biaxially textured films.