A definitive heat of vaporization of silicon through benchmark ab initio calculations on SiF4

Research was conducted to address questions on the heat of vaporization of silicon through a benchmark calculation of the total atomization energy of SiF4 molecule. Results supported the suggestion of Grev and Schaefer that the uncertain JANAF/CODATA value of 106.5+1-1.9 kcal/mol must be revised to a lower value. Future studies on heats produced by silicon compound formation could take advantage of the revision.