Cite
Photo-electroforming: 3-D geometry and materials flexibility in a MEMS fabrication process
MLA
Tsao, Che-Chih, and Emanuel Sachs. “Photo-Electroforming: 3-D Geometry and Materials Flexibility in a MEMS Fabrication Process.” Journal of Microelectromechanical Systems, vol. 8, no. 2, June 1999, p. 161. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.55081994&authtype=sso&custid=ns315887.
APA
Tsao, C.-C., & Sachs, E. (1999). Photo-electroforming: 3-D geometry and materials flexibility in a MEMS fabrication process. Journal of Microelectromechanical Systems, 8(2), 161.
Chicago
Tsao, Che-Chih, and Emanuel Sachs. 1999. “Photo-Electroforming: 3-D Geometry and Materials Flexibility in a MEMS Fabrication Process.” Journal of Microelectromechanical Systems 8 (2): 161. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.55081994&authtype=sso&custid=ns315887.