Deposition of perpendicular magnetic recording Co-Cr layers with nanosize domains using a plasma enhanced type of sputtering apparatus

A study was conducted to analyze the deposition of perpendicular magnetic recording Co-Cr layers with nanosize domains utilizing a plasma improved type of sputtering equipment. The specimen films were deposited on polyimide sheets and glass disks by sputtering Co76Cr24 targets. Experimental results indicated that the ferromagnetic lower C(sub Cr) areas of 3 nm in diameter were formed to be spatially separated by paramagnetic higher C(sub Cr) areas in the surface region of the 50-nm-thick films.