Continuous Cassette Sputtering System Provides Uniform Aluminium Application

Authors :: Kinokiri, K.
Watanabe, O.
Yamashita, Y.
Source :: JEE - Journal of Electronic Engineering. Sept, 1983, Vol. v20 Issue n201, pp86-88
Publication Year :: 1983

Subjects :: Technology
Systems
Circuitry
Materials Handling
Materials Analysis
Cassette Tape
Mass Memory
Gases
Mechanics
Maintenance
Microwaves
Electromagnetic Radiation
Silicon Chips
Semiconductor Device
Production
Semiconductor Preparation

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