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Aluminum-based metallization enhances device reliability

Authors :
Burger, Wayne
Christenson, Cheryl
Murray, Don
Yazzie, Steven H.
Source :
Microwaves & RF. Oct, 1998, 61
Publication Year :
1998

Abstract

Motorola Semiconductor Products Sector of Phoenix, AZ, has developed an aluminum-alloy top-metal transistor design that is capable of delivering median times to failure (MTTF) levels of over 100 years at 200 degrees Celsius. The system, designed for third-generation and fourth-generation two-GHz laterally diffused metal-oxide-semiconductor transistors, has been tested at the Sandia National Laboratories in Albuquerque, NM. Motorola's new aluminum top-metal design is capable of outperforming conventional one-layer metal gold designs.

Details

ISSN :
07452993
Database :
Gale General OneFile
Journal :
Microwaves & RF
Publication Type :
Periodical
Accession number :
edsgcl.50368981