Investigation of moisture uptake in low- \kappa dielectric materials

Authors :: Kubasch, C.
Klaus, C.
Ruelke, H.
Mayer, U.
Bartha, J.W.
Source :: IEEE Transactions on Electron Devices. August, 2010, Vol. 57 Issue 8, p1865, 8 p.
Publication Year :: 2010

Subjects :: Silicon compounds -- Electric properties
Oxidation-reduction reaction -- Analysis
Voltage -- Measurement
Chemical vapor deposition -- Analysis
Field-effect transistors -- Innovations
Business
Electronics
Electronics and electrical industries

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