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Corrosion-Resistant Transfer Valves suit SEMI applications

Source :
Product News Network. January 3, 2013
Publication Year :
2013

Abstract

Pneumatically operated and locked in closed and open position, VAT S043/S053 REAL L-MOTION Valve serves SEMI applications handling 200, 300, and 450 mm wafers as well as brightness bridge LED [...]

Details

Language :
English
Database :
Gale General OneFile
Journal :
Product News Network
Publication Type :
Periodical
Accession number :
edsgcl.313749522