A miniature capacitive micromachined ultrasonic transducer array for minimally invasive photoacoustic imaging

Authors :: Cheng, X.
Chen, J.
Li, C.
Source :: Journal of Microelectromechanical Systems. August, 2010, Vol. 19 Issue 4, p1002, 10 p.
Publication Year :: 2010

Subjects :: Silicon -- Acoustic properties
Silicon -- Electric properties
Ultrasonic waves -- Usage
Photoacoustic spectroscopy -- Analysis
Piezoelectric transducers -- Design and construction
Engineering and manufacturing industries
Science and technology

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