Lamb waves and resonant modes in rectangular-bar silicon resonators

Subjects

Subjects :

Computer-aided design -- Usage
Elasticity -- Analysis
Resonators -- Design and construction
Silicon -- Electric properties
Silicon -- Mechanical properties
Engineering and manufacturing industries
Science and technology

Details

Language :

English

ISSN :

10577157

Volume :

19

Issue :

4

Database :

Gale General OneFile

Journal :

Journal of Microelectromechanical Systems

Publication Type :

Academic Journal

Accession number :

edsgcl.237246808