In situ electron microscopy mechanical testing of silicon nanowires using electrostatically actuated tensile stages

Subjects

Subjects :

Electron microscopes -- Design and construction
Electrostatic interactions -- Analysis
Nanotechnology -- Research
Silicon -- Electric properties
Silicon -- Mechanical properties
Strength of materials -- Analysis
Engineering and manufacturing industries
Science and technology

Details

Language :

English

ISSN :

10577157

Volume :

19

Issue :

3

Database :

Gale General OneFile

Journal :

Journal of Microelectromechanical Systems

Publication Type :

Academic Journal

Accession number :

edsgcl.232329194