A lateral-axis microelectromechanical tuning-fork gyroscope with decoupled comb drive operating at atmospheric pressure

Authors :: Zhong Yang Guo
Long Tao Lin
Qian Cheng Zhao
Zhen Chuan Yang
Huikai Xie
Gui Zhen Yan
Source :: Journal of Microelectromechanical Systems. June, 2010, Vol. 19 Issue 3, p458, 11 p.
Publication Year :: 2010

Subjects :: Gyroscopes -- Design and construction
Microelectromechanical systems -- Design and construction
Torsion -- Analysis
Tuning (Electronics) -- Analysis
Engineering and manufacturing industries
Science and technology

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