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Direct observation of an anisotropic in-plane residual stress induced by B addition as an origin of high magnetic anisotropy field of Ru/FeCoB film

Authors :
Hirata, Ken-ichiro
Gomi, Shunsuke
Mashiko, Yasuhiro
Nakagawa, Shigeki
Source :
Journal of Applied Physics. May 1, 2010, Vol. 107 Issue 9, 09A323-1-09A323-3
Publication Year :
2010

Abstract

The in-plane magnetic anisotropy exhibited by the boron added FeCoB films prepared on Ru underlayer is analyzed. Addition of boron is shown to lead to compression of the residual stress of the films.

Details

Language :
English
ISSN :
00218979
Volume :
107
Issue :
9
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.231295369