An investigation of the electrical properties of pyrolytic carbon in reduced dimensions: vias and wires

Authors :: Graham, A.P.
Schindler, G.
Duesberg, G.S.
Lutz, T.
Weber, W.
Source :: Journal of Applied Physics. June 1, 2010, Vol. 107 Issue 11, 114316-1-114316-4
Publication Year :: 2010
Abstract: Several studies are conducted to explain the various electrical properties of the nanoscale vertical interconnect structures (vias) made from chemical vapor deposited carbon. The formation of several such vias and wires is also discussed.

Subjects :: Binding energy -- Evaluation
Chemical vapor deposition -- Usage
Density functionals -- Usage
Diffusion processes -- Analysis
Physics

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