Characterization of ecapsulated mcromechanical rsonators saled and cated wth poycrystalline SiC

Subjects

Subjects :

Elasticity -- Analysis
Microelectromechanical systems -- Design and construction
Silicon carbide -- Mechanical properties
Silicon carbide -- Electric properties
Silicon carbide -- Structure
Dielectric films -- Mechanical properties
Dielectric films -- Electric properties
Thin films -- Mechanical properties
Thin films -- Electric properties
Engineering and manufacturing industries
Science and technology

Details

Language :

English

ISSN :

10577157

Volume :

19

Issue :

2

Database :

Gale General OneFile

Journal :

Journal of Microelectromechanical Systems

Publication Type :

Academic Journal

Accession number :

edsgcl.227622358