Effects of [([NH.sub.4]).sub.2][S.sub.x] treatment on indium nitride surfaces

A combination of Hall effect measurement and scanning Kelvin probe microscopy techniques is employed to explain the various effects of the [([NH.sub.4]).sub.2][S.sub.x] treatment on the indium nitride surfaces. The treatment is shown to lead to a significant increase in the sheet resistance, while reducing the sheet carrier density of the system.