Powder formation in Si[H.sub.4]-[H.sub.2] discharge in large area capacitively coupled reactors: a study of the combined effect of interelectrode distance and pressure

Authors :: Strahm, B.
Hollenstein, Ch.
Source :: Journal of Applied Physics. Jan 15, 2010, Vol. 107 Issue 2, 023302-1-023302-7
Publication Year :: 2010
Abstract: Time- and space-resolved light scattering experiments are performed in an industrial-type large area reactor with a variable interelectrode distance. The studies have shown that the onset of powder formation has depended on the product of the interelectrode distance and the gas residence time in the discharge.

Subjects :: Electric discharges -- Analysis
Electric discharges through gases -- Analysis
Electrodes -- Structure
Electrodes -- Electric properties
Materials at high pressures -- Analysis
Silicon compounds -- Structure
Silicon compounds -- Electric properties
Silicon compounds -- Mechanical properties
Physics

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