Sputtered Si[O.sub.2] as low acoustic impedance material for Bragg mirror fabrication in BAW resonators

Subjects

Subjects :

Resonators -- Design and construction
Silica -- Acoustic properties
Silica -- Optical properties
Silica -- Electric properties
Sound-waves -- Analysis
Acoustooptical devices -- Design and construction
Business
Electronics
Electronics and electrical industries

Details

Language :

English

ISSN :

08853010

Volume :

57

Issue :

1

Database :

Gale General OneFile

Journal :

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

Publication Type :

Academic Journal

Accession number :

edsgcl.216929994