Fiber-optic laser Doppler vibrometer to dynamically measure MEMS actuator with in-plane motion

Subjects

Subjects :

Actuators -- Design and construction
Doppler effect -- Analysis
Fiber optics -- Analysis
Microelectromechanical systems -- Analysis
Fiber optics
Engineering and manufacturing industries
Science and technology

Details

Language :

English

ISSN :

10577157

Volume :

18

Issue :

6

Database :

Gale General OneFile

Journal :

Journal of Microelectromechanical Systems

Publication Type :

Academic Journal

Accession number :

edsgcl.215875985