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Micromachined thin film plate acoustic wave resonators (FPAR): part II

Authors :
Yantchev, V.
Arapan, L.
Katardjiev, I.
Source :
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. Dec, 2009, Vol. 56 Issue 12, p2701, 10 p.
Publication Year :
2009

Subjects

Subjects :
Resonators -- Design and construction
Thin films -- Usage
Transducers -- Design and construction
Dielectric films -- Usage
Business
Electronics
Electronics and electrical industries

Details

Language :
English
ISSN :
08853010
Volume :
56
Issue :
12
Database :
Gale General OneFile
Journal :
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Publication Type :
Academic Journal
Accession number :
edsgcl.215440141

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