Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching

MLA

Mendoza-Galvan, Arturo, et al. “Spectroscopic Ellipsometry Analysis of Silicon Nanotips Obtained by Electron Cyclotron Resonance Plasma Etching.” Applied Optics, vol. 48, no. 26, Sept. 2009, p. 4996. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.210223187&authtype=sso&custid=ns315887.

APA

Mendoza-Galvan, A., Jarrendahl, K., Arwin, H., Huang, Y.-F., Chen, L.-C., & Chen, K.-H. (2009). Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching. Applied Optics, 48(26), 4996.

Chicago

Mendoza-Galvan, Arturo, Kenneth Jarrendahl, Hans Arwin, Yi-Fan Huang, Li-Chyong Chen, and Kuei-Hsien Chen. 2009. “Spectroscopic Ellipsometry Analysis of Silicon Nanotips Obtained by Electron Cyclotron Resonance Plasma Etching.” Applied Optics 48 (26): 4996. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.210223187&authtype=sso&custid=ns315887.