Microstructure and soft magnetic properties of FeSiAI(Ti/Ta)(O)N

Authors :: Hiramoto, M.
Matsukawa, N.
Sakakima, H.
Ichikawa, Y.
Lijima, K.
Source :: Journal of Applied Physics. June 1, 1998, Vol. 83 Issue 11, p6655, 3 p.
Publication Year :: 1998
Abstract: The magnetic, structural and corrosive properties of sputtered FeSiA1(Ti/Ta)(O)N films were investigated. The films are believed to be sensitive on the grain structure due to the small magnetocrystalline anisotropy (K(sub1)) of the FeSiA1 system. Soft magnetic properties were observed following thermal treatment, and the composition of the granular grains and needle shaped grains were mostly Fe and FeSi.