A high-resolution silicon monolithic nozzle array for inkjet printing

A high-resolution monolithic nozzle array was developed for inkjet printing. A bulk anisotropic etching technology was used to fabricate the nozzles in order to undercut a network of highly-boron-doped silicon support ribs. The fabrication was found compatible with the addition of on-chip circuitry for multiplexing the heater control signals. The high thermal conductivity of the silicon ribs in the channel ceiling enhanced the heat transfer efficiency to the ink.