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Nonlinearity and hysteresis of resonant strain gauges

Authors :
Gui, Chengqun
Legtenberg, Rob
Tilmans, Harri A.C.
Fluitman, Jan H.J.
Elwenspoek, Miko
Source :
Journal of Microelectromechanical Systems. March, 1998, Vol. 7 Issue 1, p122, 6 p.
Publication Year :
1998

Details

ISSN :
10577157
Volume :
7
Issue :
1
Database :
Gale General OneFile
Journal :
Journal of Microelectromechanical Systems
Publication Type :
Academic Journal
Accession number :
edsgcl.20609474