The effect of the sputtering gas (Ar, Xe) on FePt clusters formation: structural and magnetic properties

Authors :: Cantelli, V.
Grenzer, J.
von Borany, J.
Fassbender, J.
Source :: Journal of Applied Physics. April 1, 2009, Vol. 105 Issue 7, 07B529-1-07B529-3
Publication Year :: 2009
Abstract: The effect of the sputtering gases, Ar and Xe, on FePt clusters formation by magnetron sputtering deposition at high working pressures is studied. Ar assisted growths have led to FePt clusters in the [L1.sub.0] phase only if the sequential layer deposition is used, whereas for Xe no differences in the deposition methods are seen.

Subjects :: Argon -- Atomic properties
Argon -- Electric properties
Coating processes -- Analysis
Iron alloys -- Magnetic properties
Iron alloys -- Structure
Platinum -- Magnetic properties
Sputtering (Physics) -- Usage
Xenon -- Atomic properties
Xenon -- Electric properties
Physics

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