Simple fabrication of metal-based piezoelectric MEMS by direct deposition of Pb(Zr, Ti)[O.sub.3] thin films on titanium substrates

MLA

Kanda, Kensuke, et al. “Simple Fabrication of Metal-Based Piezoelectric MEMS by Direct Deposition of Pb(Zr, Ti)[O.Sub.3] Thin Films on Titanium Substrates.” Journal of Microelectromechanical Systems, vol. 18, no. 3, June 2009, p. 610. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.201802012&authtype=sso&custid=ns315887.

APA

Kanda, K., Kanno, I., Kotera, H., & Wasa, K. (2009). Simple fabrication of metal-based piezoelectric MEMS by direct deposition of Pb(Zr, Ti)[O.sub.3] thin films on titanium substrates. Journal of Microelectromechanical Systems, 18(3), 610.

Chicago

Kanda, Kensuke, Isaku Kanno, Hidetoshi Kotera, and Kiyotaka Wasa. 2009. “Simple Fabrication of Metal-Based Piezoelectric MEMS by Direct Deposition of Pb(Zr, Ti)[O.Sub.3] Thin Films on Titanium Substrates.” Journal of Microelectromechanical Systems 18 (3): 610. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.201802012&authtype=sso&custid=ns315887.