Magnetically actuated, addressable microstructures

Surface-micromachined, batch-fabricated structures that combine plated-nickel films with polysilicon mechanical flexures to produce individually addressable, magnetically activated devices have been fabricated and tested. Individual microactuator control has been achieved in two ways: 1) by actuating devices using the magnetic field generated by coils integrated around each device and 2) by using electrostatic forces to clamp selected devices to an insulated ground plane while unclamped devices are freely moved through large out-of-plane excursions by an off-chip magnetic field. The present application for these structures is as micromirrors for microphotonic systems where they can be used either for selection from an array of mirrors or else individually for switching among fiber paths. Index Terms - Individually addressed micromirrors, magnetic actuation, surface micromachining, magnetic and electrostatic addressing.