Continuous YBa2Cu3O7-delta film deposition by optically controlled reactive thermal co-evaporation

A thermal co-evaporation system was used for continuous YBa2Cu3O7-delta film deposition on large areas. Individual metal fluxes were measured through an atomic absorption spectroscopy-based optical rate control system. Results reveal that in situ reloading of metal resources at long time is possible. The grown films also exhibited excellent superconducting properties as compared to films developed using a standard co-evaporation system.