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Extrinsic dislocation loop behavior in silicon with a thermally grown silicon nitride film
- Source :
- Journal of Applied Physics. June 1, 1997, Vol. 81 Issue 11, p7175, 6 p.
- Publication Year :
- 1997
- Subjects :
- Silicon nitride -- Research
Transmission electron microscopes -- Usage
Physics
Subjects
Details
- ISSN :
- 00218979
- Volume :
- 81
- Issue :
- 11
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.19789307