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Extrinsic dislocation loop behavior in silicon with a thermally grown silicon nitride film

Authors :
Herner, S.B.
Krishnamoorthy, V.
Jones, K.S.
Mogi, T.K.
Thompson, M.O.
Gossmann, H.-J.
Source :
Journal of Applied Physics. June 1, 1997, Vol. 81 Issue 11, p7175, 6 p.
Publication Year :
1997

Details

ISSN :
00218979
Volume :
81
Issue :
11
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.19789307