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Frequency-multiplex Fourier transform profilometry: a single-shot three-dimensional shape measurement of objects with large height discontinuities and/or surface isolations

Authors :
Takeda, Mitsuo
Gu, Quan
Kinoshita, Masaya
Takai, Hideaki
Takahashi, Yosuke
Source :
Applied Optics. August 1, 1997, Vol. 36 Issue 22, p5347, 8 p.
Publication Year :
1997

Abstract

The performance of Fourier-transform profilometry is enhanced by a new technique that is based on spatial frequency multiplexing combined with the Gushov-Solodkin phase unwrapping algorithm. The technique permits the three-dimensional shape measurement of objects that have discontinuous height steps and/or spatially isolated surfaces, which has not been possible by conventional Fourier-transform profilometry. An important feature of the technique is that it requires only a single fringe pattern; the single-shot recording makes possible the instantaneous three-dimensional shape measurement of discontinuous objects in fast motion. Experimental results are presented that demonstrate the validity of the principle. Key words: Phase unwrapping, profilometry, fringe analysis, optical metrology, heterodyne interferometry, Fourier transform.

Details

ISSN :
1559128X
Volume :
36
Issue :
22
Database :
Gale General OneFile
Journal :
Applied Optics
Publication Type :
Academic Journal
Accession number :
edsgcl.19729148