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Influence of doping profiles on coherent acoustic phonon detection and generation in semiconductors
- Source :
- Journal of Applied Physics. Dec 15, 2008, Vol. 104 Issue 12, 123509-1-123509-5
- Publication Year :
- 2008
-
Abstract
- A laser based picosecond ultrasound technique is used to study the doping profile in different n-doped GaAs homoepitaxial structures grown by molecular beam epitaxy. The picosecond ultrasound is found to be good tool to detect doping profile with doping densities of the order of [10.sup.18] [cm.sup.-3] based on a different sensitivity function for coherent strain pulse in the doped and undoped regions.
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 104
- Issue :
- 12
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.195719626