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Influence of doping profiles on coherent acoustic phonon detection and generation in semiconductors

Authors :
Hudert, F.
Bartels, A.
Dekorsy, T.
Kohler, K.
Source :
Journal of Applied Physics. Dec 15, 2008, Vol. 104 Issue 12, 123509-1-123509-5
Publication Year :
2008

Abstract

A laser based picosecond ultrasound technique is used to study the doping profile in different n-doped GaAs homoepitaxial structures grown by molecular beam epitaxy. The picosecond ultrasound is found to be good tool to detect doping profile with doping densities of the order of [10.sup.18] [cm.sup.-3] based on a different sensitivity function for coherent strain pulse in the doped and undoped regions.

Details

Language :
English
ISSN :
00218979
Volume :
104
Issue :
12
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.195719626