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Effect of chemical oxide layers on platinum-enhanced oxidation of silicon

Authors :
Namba, K.
Yuasa, T.
Nakato, Y.
Yoneda, K.
Kato, H.
Kobayashi, H.
Source :
Journal of Applied Physics. May 15, 1997, Vol. 81 Issue 10, p7006, 6 p.
Publication Year :
1997

Details

ISSN :
00218979
Volume :
81
Issue :
10
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.19567264