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Diffusion barriers for Al and Cu metallizations on Si
- Source :
- Journal of Applied Physics. Jan 15, 1997, Vol. 81 Issue 2, p664, 8 p.
- Publication Year :
- 1997
Details
- ISSN :
- 00218979
- Volume :
- 81
- Issue :
- 2
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.19117619