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An annealing study of an oxygen vacancy related defect in SrTi[O.sub.3] substrates

Authors :
Zvanut, M.E.
Jeddy, S.
Towett, E.
Janowski, G.M.
Brooks, C.
Schlom, D.
Source :
Journal of Applied Physics. Sept 15, 2008, Vol. 104 Issue 6, 064122-1-064122-5
Publication Year :
2008

Abstract

The stability of point defects in SrTi[O.sub.3] (STO) during thin film processing is addressed by using electron paramagnetic resonance (EPR) spectroscopy. The results have shown that oxygen treatment has altered the electrical charge state of the vacancy, while exposure to vacuum causes different changes, either conversion to a different charge state or creation of the vacancy.

Details

Language :
English
ISSN :
00218979
Volume :
104
Issue :
6
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.189848664