Kinetics and thermodynamics constraints in Pt gettering by P diffusion in Si

Subjects

Subjects :

Thermodynamics -- Observations
Chemical reaction, Rate of -- Analysis
Platinum -- Usage
Silicon -- Research
Semiconductors -- Diffusion
Physics

Details

ISSN :

00218979

Volume :

80

Issue :

1

Database :

Gale General OneFile

Journal :

Journal of Applied Physics

Publication Type :

Academic Journal

Accession number :

edsgcl.18831123