Ion-beam synthesis of amorphous SiC films: structural analysis and recrystallization

Authors :: Serre, C.
Calvo-Barrio, L.
Perez-Rodriguez, A.
Romano-Rodriguez, A.
Morante, J.R.
Pacaud, Y.
Kogler, R.
Heera, V.
Skorupa, W.
Source :: Journal of Applied Physics. May 1, 1996, Vol. 79 Issue 9, p6907, 7 p.
Publication Year :: 1996

Subjects :: Amorphous semiconductors -- Research
Ion bombardment -- Usage
Recrystallization (Metallurgy) -- Research
Physics

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