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Diffraction efficiency of a grating coupler for an array illuminator
- Source :
- Applied Optics. July 10, 1996, Vol. 35 Issue 20, p3891, 8 p.
- Publication Year :
- 1996
-
Abstract
- The diffraction efficiency of a grating coupler having a surface-relief grating is calculated by the use of coupled-wave theory. The grating couplers are fabricated to examine the validity of the calculated result. The dependence of the measured diffraction efficiency on the groove depth of the grating coupler agrees well with the calculated results. The array illuminator, which emits 10 and 20 beams with equal intensity, is designed and fabricated through the use of these numerical results. The uniformity error of the output beam caused by the error of the diffraction efficiency is also discussed. Key words: Array illuminator, grating coupler, diffraction efficiency, optical computing.
- Subjects :
- Diffraction gratings -- Research
Astronomy
Physics
Subjects
Details
- ISSN :
- 1559128X
- Volume :
- 35
- Issue :
- 20
- Database :
- Gale General OneFile
- Journal :
- Applied Optics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.18659133