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The interface between silicon and a high-k oxide

Authors :
Forst, Clemens J.
Ashman, Christopher R.
Schwarz, Karlheinz
Blochl, Peter E.
Source :
Nature. January 1, 2004, Vol. 427 Issue 6969, p53, 4 p.
Publication Year :
2004

Abstract

Author(s): Clemens J. Först [1, 2]; Christopher R. Ashman [1]; Karlheinz Schwarz [2]; Peter E. Blöchl (corresponding author) [1] The ability of the semiconductor industry to continue scaling microelectronic devices [...]

Details

Language :
English
ISSN :
00280836
Volume :
427
Issue :
6969
Database :
Gale General OneFile
Journal :
Nature
Publication Type :
Academic Journal
Accession number :
edsgcl.186371855
Full Text :
https://doi.org/10.1038/nature02204