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DC and transient performance of 4H-SiC double-implant MOSFETs

Authors :
Losee, Pete A.
Matocha, Kevin
Arthur, Stephen D.
Nasadoski, Jeffrey
Stum, Zachary
Garrett, Jerome L.
Schutten, Michael
Dunne, Greg
Stevanovic, Ljubisa
Source :
IEEE Transactions on Electron Devices. August, 2008, Vol. 55 Issue 8, p1824, 6 p.
Publication Year :
2008

Abstract

SiC vertical MOSFETs are fabricated and characterized with blocking voltages of about 1 kV and a specific on-resistance as low as 8.3 m[omega].[cm.sup.2]. The internal body diode's reverse recovery characteristics have shown injection-limited conduction, which are attributed to the implanted P-anode layers.

Details

Language :
English
ISSN :
00189383
Volume :
55
Issue :
8
Database :
Gale General OneFile
Journal :
IEEE Transactions on Electron Devices
Publication Type :
Academic Journal
Accession number :
edsgcl.184770516